its all just numbers,
for rotifers its an easy call, you can easily have concentrations high enough to consume a large amount of O2, making it harder to get the O2 concentration to normal by using air alone, dont forget you do need to use air, you need to bleed off the CO2 and such O2 shouldnt be used to do this as its just a waste
for fish, you have to look at your setup, are the O2 levels low enough to be a concern, if so then you are much better off after degassing using O2 to bring the DO up to normal levels.
there is no benifit in bringing the entire volume upto saturation.
using one of those bio-ball mixer dudads works just as good for oxgyen as it does for CO2 and allows you to guess at what amount you want to supply without setting up a controller.
as for ozone, I only played around with it, never used it for long enough see a difference. but there should be an overall improvement in a breeding setup beyond what a reef would see.